Invention Grant
- Patent Title: Bond heads for thermocompression bonders, thermocompression bonders, and methods of operating the same
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Application No.: US15217389Application Date: 2016-07-22
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Publication No.: US09847314B2Publication Date: 2017-12-19
- Inventor: Matthew B. Wasserman , Michael P. Schmidt-Lange
- Applicant: Kulicke and Soffa Industries, Inc.
- Applicant Address: US PA Fort Washington
- Assignee: Kulicke and Soffa Industries, Inc.
- Current Assignee: Kulicke and Soffa Industries, Inc.
- Current Assignee Address: US PA Fort Washington
- Agency: Stradley Ronon Stevens & Young, LLP
- Main IPC: B23K31/02
- IPC: B23K31/02 ; H01L23/00 ; B23K3/08 ; B23K37/00 ; B23K1/00 ; B23K1/008 ; B23K3/02 ; B23K101/42
Abstract:
A bond head for a thermocompression bonder is provided. The bond head includes a tool configured to hold a workpiece to be bonded, a heater configured to heat the workpiece to be bonded, and a chamber proximate the heater. The chamber is configured to receive a cooling fluid for cooling the heater.
Public/Granted literature
- US20160329296A1 BOND HEADS FOR THERMOCOMPRESSION BONDERS, THERMOCOMPRESSION BONDERS, AND METHODS OF OPERATING THE SAME Public/Granted day:2016-11-10
Information query
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