Invention Grant
- Patent Title: Adhesive resins for wafer bonding
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Application No.: US14865251Application Date: 2015-09-25
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Publication No.: US09850406B2Publication Date: 2017-12-26
- Inventor: Robert D. Allen , Jeffrey Gelorme , Li-Wen Hung , Ratnam Sooriyakumaran , Linda K. Sundberg
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Tutunjian & Bitetto, P.C.
- Agent Louis J. Percello
- Main IPC: H01L21/683
- IPC: H01L21/683 ; C09J129/10 ; H01L21/50 ; C09J125/08 ; C08F212/08 ; C09J133/06

Abstract:
An adhesive bonding method that includes bonding a handling wafer to a front side surface of a device wafer with an adhesive comprising N-substituted maleimide copolymers. The device wafer may then be thinned from the backside surface of the device wafer while the device wafer is adhesively engaged to the handling wafer. The adhesive can then be removed by laser debonding, wherein the device wafer is separated from the handling wafer.
Public/Granted literature
- US20160133499A1 ADHESIVE RESINS FOR WAFER BONDING Public/Granted day:2016-05-12
Information query
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