Invention Grant
- Patent Title: Transistor plasma charging eliminator
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Application No.: US14856579Application Date: 2015-09-17
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Publication No.: US09852248B2Publication Date: 2017-12-26
- Inventor: Wallace W Lin
- Applicant: Wallace W Lin
- Main IPC: G06F17/50
- IPC: G06F17/50

Abstract:
An integrated-circuit design tool system capable of minimizing a plasma induced charging effect to a transistor in a plasma-based process performed for a dielectric layer on a metal layer comprises a pre-processing unit, a charging evaluator engine, a charging eliminator engine, a post-processing unit, and a non-transitory computer readable medium.
Public/Granted literature
- US20160179995A1 Transistor Plasma Charging Eliminator Public/Granted day:2016-06-23
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