• Patent Title: Transistor plasma charging eliminator
  • Application No.: US14856579
    Application Date: 2015-09-17
  • Publication No.: US09852248B2
    Publication Date: 2017-12-26
  • Inventor: Wallace W Lin
  • Applicant: Wallace W Lin
  • Main IPC: G06F17/50
  • IPC: G06F17/50
Transistor plasma charging eliminator
Abstract:
An integrated-circuit design tool system capable of minimizing a plasma induced charging effect to a transistor in a plasma-based process performed for a dielectric layer on a metal layer comprises a pre-processing unit, a charging evaluator engine, a charging eliminator engine, a post-processing unit, and a non-transitory computer readable medium.
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