Invention Grant
- Patent Title: Using radial basis function networks and hyper-cubes for excursion classification in semi-conductor processing equipment
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Application No.: US15043229Application Date: 2016-02-12
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Publication No.: US09852371B2Publication Date: 2017-12-26
- Inventor: Dermot Cantwell
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Lowenstein Sandler LLP
- Main IPC: G06N99/00
- IPC: G06N99/00 ; G06N3/08 ; G06N3/063 ; G06N3/06
Abstract:
A method and system for analysis of data, including creating a first node, determining a first hyper-cube for the first node, determining whether a sample resides within the first hyper-cube. If the sample does not reside within the first hyper-cube, the method includes determining whether the sample resides within a first hyper-sphere, wherein the first hyper-sphere has a radius equal to a diagonal of the first hyper-cube.
Public/Granted literature
Information query
