Invention Grant
- Patent Title: Dressing apparatus, polishing apparatus having the dressing apparatus, and polishing method
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Application No.: US14274231Application Date: 2014-05-09
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Publication No.: US09855638B2Publication Date: 2018-01-02
- Inventor: Satoshi Nagai , Suguru Ogura , Kaoru Hamaura
- Applicant: Ebara Corporation
- Applicant Address: JP Tokyo
- Assignee: Ebara Corporation
- Current Assignee: Ebara Corporation
- Current Assignee Address: JP Tokyo
- Agency: Leydig, Voit & Mayer, Ltd.
- Priority: JP2013-102970 20130515
- Main IPC: B24B53/017
- IPC: B24B53/017 ; B24B53/00

Abstract:
A dressing apparatus capable of bringing an overall dressing surface of a dresser into uniform sliding contact with a polishing surface of a polishing pad and capable of uniformly dressing the overall polishing surface of the polishing pad is disclosed. The dressing apparatus includes a dresser configured to rub against a polishing surface to dress the polishing surface that is used for polishing a substrate, a dresser shaft that applies a load to the dresser, at least one load-applying device configured to apply a downward load to a part of a peripheral portion of the dresser, and an operation controller configured to control operation of the load-applying device.
Public/Granted literature
- US20140349552A1 DRESSING APPARATUS, POLISHING APPARATUS HAVING THE DRESSING APPARATUS, AND POLISHING METHOD Public/Granted day:2014-11-27
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