Invention Grant
- Patent Title: Electronic device, pressure sensor, altimeter, electronic apparatus, and moving object
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Application No.: US14995401Application Date: 2016-01-14
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Publication No.: US09856138B2Publication Date: 2018-01-02
- Inventor: Nobuyuki Tanaka
- Applicant: Seiko Epson Corporation
- Applicant Address: JP Tokyo
- Assignee: SEIKO EPSON CORPORATION
- Current Assignee: SEIKO EPSON CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: JP2015-013014 20150127
- Main IPC: G01L9/00
- IPC: G01L9/00 ; B81C1/00

Abstract:
An electronic device includes: a substrate; a piezoresistive element which is disposed on the side of the surface on one side of the substrate; a wall section which is disposed to surround the piezoresistive element in a plan view of the substrate, on the side of the surface on one side of the substrate; via wiring which is disposed on the side of the surface on one side of the substrate; and a covering layer which is disposed away from the via wiring in the plan view on the side opposite to the substrate with respect to the wall section and configures a cavity portion along with the substrate and the wall section.
Public/Granted literature
- US20160214856A1 Electronic Device, Pressure Sensor, Altimeter, Electronic Apparatus, and Moving Object Public/Granted day:2016-07-28
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