Invention Grant
- Patent Title: Ceramic material, method for manufacturing the same, and semiconductor manufacturing apparatus member
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Application No.: US15215884Application Date: 2016-07-21
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Publication No.: US09856147B2Publication Date: 2018-01-02
- Inventor: Yosuke Sato , Katsuhiro Inoue , Yuji Katsuda
- Applicant: NGK INSULATORS, LTD.
- Applicant Address: JP Nagoya
- Assignee: NGK Insulators, Ltd.
- Current Assignee: NGK Insulators, Ltd.
- Current Assignee Address: JP Nagoya
- Agency: Burr & Brown, PLLC
- Priority: JP2015-149314 20150729
- Main IPC: C04B35/04
- IPC: C04B35/04 ; C01F17/00 ; C04B35/50 ; C04B35/505 ; C04B35/622

Abstract:
The ceramic material of the present invention contains a crystalline phase of a complex oxide containing a Group II element M and a rare earth element RE. The Group II element M is Sr, Ca, or Ba. An XRD diagram of the ceramic material shows a first new peak between peaks derived from the (040) plane and the (320) plane of MRE2O4. Such a ceramic material may be manufactured by, for example, preparing a material containing MRE2O4 or a material capable of reacting in thermal spray flame to produce MRE2O4 as a thermal spray material, and thermally spraying the thermal spray material onto a predetermined object.
Public/Granted literature
- US20170029286A1 CERAMIC MATERIAL, METHOD FOR MANUFACTURING THE SAME, AND SEMICONDUCTOR MANUFACTURING APPARATUS MEMBER Public/Granted day:2017-02-02
Information query
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