Invention Grant
- Patent Title: Measuring probe for non-destructive measuring of the thickness of thin layers
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Application No.: US13066796Application Date: 2011-04-25
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Publication No.: US09857171B2Publication Date: 2018-01-02
- Inventor: Helmut Fischer
- Applicant: Helmut Fischer
- Applicant Address: DE Sindelfingen
- Assignee: HELMUT FISCHER GMBH INSTITUT FUER ELEKTRONIK UND MESSTECHNIK
- Current Assignee: HELMUT FISCHER GMBH INSTITUT FUER ELEKTRONIK UND MESSTECHNIK
- Current Assignee Address: DE Sindelfingen
- Agency: Kriegsman & Kriegsman
- Priority: DE202010006062U 20100423
- Main IPC: G01R7/06
- IPC: G01R7/06 ; G01B21/08 ; G01B7/06

Abstract:
The invention relates to a measuring probe for non-destructive measuring of the thickness of thin layers on an object with a measuring head, which comprises at least one sensor element for contact on a measurement surface of an object, and with a support device for receiving the measuring head, which is at least partly surrounded by a housing, wherein at least one further measuring head, which is adjacent to and separated from the first measuring head, is arranged on the support device, which can be controlled independently of the first measuring head.
Public/Granted literature
- US20110260720A1 Measuring probe for non-destructive measuring of the thickness of thin layers Public/Granted day:2011-10-27
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