Gyro sensor with spring structures to suppress influence of the same phase mode on a vibration mode
Abstract:
A gyro sensor capable of suppressing influence of the same phase mode on a vibration mode includes a vibrating body, a first spring structure portion that extends in a direction along a first axis and is connected to the vibrating body, first and second vibrating portions that are disposed in parallel to each other in the direction along the first axis and are excited and vibrated in an opposite phase to each other, and a second spring structure portion that extends in the direction along the first axis and is connected to the first and second vibrating portions, in which a first spring constant K1 of the first spring structure portion is smaller than a second spring constant K2 from a middle point at which a length between both ends of the second spring structure portion is equally divided into two to one end of the second spring structure portion.
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