Invention Grant
- Patent Title: Optical inspection system using multi-facet imaging
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Application No.: US12664671Application Date: 2008-06-15
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Publication No.: US09857312B2Publication Date: 2018-01-02
- Inventor: Michael Lev , Ehud Efrat , Roni Flieswasser
- Applicant: Michael Lev , Ehud Efrat , Roni Flieswasser
- Applicant Address: IL Migdal Haemeq
- Assignee: CAMTEK LTD.
- Current Assignee: CAMTEK LTD.
- Current Assignee Address: IL Migdal Haemeq
- Agency: Reches Patents
- International Application: PCT/IL2008/000815 WO 20080615
- International Announcement: WO2008/152648 WO 20081218
- Main IPC: G01N21/95
- IPC: G01N21/95 ; G01N21/88

Abstract:
An optical inspection system, the system includes: (i) an image sensor; and (ii) a single optical element, that at least partially surrounds an edge of an inspected object; wherein the optical element is adapted to direct light from different areas of the edge of the inspected object towards the image sensor so that the image sensor concurrently obtains images of the different areas.
Public/Granted literature
- US20110141267A1 OPTICAL INSPECTION SYSTEM USING MULTI-FACET IMAGING Public/Granted day:2011-06-16
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