Invention Grant
- Patent Title: Focusing leveling device
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Application No.: US15108886Application Date: 2014-12-24
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Publication No.: US09857702B2Publication Date: 2018-01-02
- Inventor: Haijun Song , Kan Lu , Feibiao Chen
- Applicant: SHANGHAI MICRO ELECTRONICS EQUIPMENT CO., LTD.
- Applicant Address: CN Shanghai
- Assignee: Shanghai Micro Electronics Equipment (Group) Co., Ltd.
- Current Assignee: Shanghai Micro Electronics Equipment (Group) Co., Ltd.
- Current Assignee Address: CN Shanghai
- Agency: Muncy, Geissler, Olds & Lowe, P.C.
- Priority: CN201310747393 20131231
- International Application: PCT/CN2014/094771 WO 20141224
- International Announcement: WO2015/101196 WO 20150709
- Main IPC: G03F7/20
- IPC: G03F7/20 ; G03F9/00

Abstract:
A focusing and leveling apparatus, including: an illumination light source (201) for emanating a light beam; an illumination lens group (202), a projecting unit, an object (209) being measured, a detecting unit, a refractive unit, a relay lens group and a photoelectric detector (220), disposed sequentially in this order in a transmission path of the light beam. The projecting unit includes projection slits (203) defining a plurality of non-linearly arranged marks, such that after passing sequentially through the illumination lens group (202), the projecting unit, the object (209) being measured and the detecting unit, the light beam emanated by the illumination light source (201) becomes a plurality of non-linearly arranged sub-beams corresponding to the plurality of marks. The refractive unit is so configured that after passing through the refractive unit, the plurality of sub-beams form a plurality of linearly arranged light spots.
Public/Granted literature
- US20160327875A1 FOCUSING LEVELING DEVICE Public/Granted day:2016-11-10
Information query
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