Invention Grant
- Patent Title: Tantalum sputtering target and production method therefor
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Application No.: US14654866Application Date: 2014-02-28
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Publication No.: US09859104B2Publication Date: 2018-01-02
- Inventor: Shinichiro Senda , Kotaro Nagatsu
- Applicant: JX Nippon Mining & Metals Corporation
- Applicant Address: JP Tokyo
- Assignee: JX Nippon Mining & Metals Corporation
- Current Assignee: JX Nippon Mining & Metals Corporation
- Current Assignee Address: JP Tokyo
- Agency: Howson & Howson LLP
- Priority: JP2013-041718 20130304
- International Application: PCT/JP2014/055075 WO 20140228
- International Announcement: WO2014/136679 WO 20140912
- Main IPC: C23C14/00
- IPC: C23C14/00 ; H01J37/34 ; C22C27/02 ; C22F1/00 ; C22F1/18 ; C23C14/34

Abstract:
A tantalum sputtering target, wherein on a sputtering surface of the tantalum sputtering target, an orientation rate of a (200) plane is 70% or less, an orientation rate of a (222) plane is 10% or more, an average crystal grain size is 50 μm or more and 150 μm or less, and a variation in a crystal grain size is 30 μm or less. By controlling the crystal orientation of the target, it is possible to increase the sputter rate, consequently deposit the required film thickness in a short period of time, and improve the throughput. In addition, by controlling the crystal grain size on the sputtering surface of the target, an effect is yielded in that the abnormal discharge during sputtering can be suppressed.
Public/Granted literature
- US20150348765A1 TANTALUM SPUTTERING TARGET AND PRODUCTION METHOD THEREFOR Public/Granted day:2015-12-03
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