Invention Grant
- Patent Title: Solution-processed sol-gel films including a crystallization aid, devices including same, and methods
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Application No.: US14296163Application Date: 2014-06-04
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Publication No.: US09859116B2Publication Date: 2018-01-02
- Inventor: Yuhua Niu , Peter T. Kazlas
- Applicant: SAMSUNG ELECTRONICS CO., LTD
- Applicant Address: KR Gyeonggi-Do
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Gyeonggi-Do
- Agency: Cantor Colburn LLP
- Main IPC: H01L21/02
- IPC: H01L21/02 ; H01L51/50 ; C23C18/12 ; H01L29/15 ; H01L29/24
Abstract:
A method for preparing a sol-gel film is disclosed. The method comprises providing a sol-gel composition comprising one or more sol-gel film precursors and a crystallization aid, and processing the sol-gel composition by solution processing to form the sol-gel film. In certain embodiments, the sol-gel film comprises one or more metal oxides. A preferred crystallization aid includes triphenylphosphine oxide. A composition for making a sol-gel film, a sol-gel film, a device including a sol-gel film and a method for making such device are also disclosed.
Public/Granted literature
- US20150001528A1 SOLUTION-PROCESSED SOL-GEL FILMS, DEVICES INCLUDING SAME, AND METHODS Public/Granted day:2015-01-01
Information query
IPC分类:
