Invention Grant
- Patent Title: Block patterning method enabling merged space in SRAM with heterogeneous mandrel
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Application No.: US15072626Application Date: 2016-03-17
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Publication No.: US09859125B2Publication Date: 2018-01-02
- Inventor: Min Gyu Sung , Ruilong Xie , Chanro Park , Hoon Kim , Kwan-Yong Lim
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Ditthavong & Steiner, P.C.
- Main IPC: H01L21/311
- IPC: H01L21/311 ; H01L21/3065 ; H01L21/308 ; H01L27/11 ; H01L29/06 ; H01L29/161

Abstract:
Methodologies and a device for SRAM patterning are provided. Embodiments include forming a spacer layer over a fin channel, the fin channel being formed in four different device regions; forming a bottom mandrel over the spacer layer; forming a top mandrel directly over the bottom mandrel, wherein the top and bottom mandrels including different materials; forming a buffer oxide layer over the top mandrel; forming an anti-reflective coating (ARC) over the first OPL; forming a photoresist (PR) over the ARC and patterning the PR; and etching the first OPL, ARC, buffer oxide, and top mandrel with the pattern of the PR, wherein a pitch of the PR as patterned is different in each of the four device regions.
Public/Granted literature
- US20170271163A1 BLOCK PATTERNING METHOD ENABLING MERGED SPACE IN SRAM WITH HETEROGENEOUS MANDREL Public/Granted day:2017-09-21
Information query
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