Invention Grant
- Patent Title: Test method and structure for integrated circuits before complete metalization
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Application No.: US15062484Application Date: 2016-03-07
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Publication No.: US09859177B2Publication Date: 2018-01-02
- Inventor: Janakiraman Viraraghavan , Ramesh Raghavan , Balaji Jayaraman , Thejas Kempanna , Rajesh R. Tummuru , Toshiaki Kirihata
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Hoffman Warnick LLC
- Agent Michael Le Strange
- Main IPC: G11C7/00
- IPC: G11C7/00 ; H01L21/66 ; H01L27/115 ; H01L27/105 ; H01L49/02

Abstract:
Aspects of the present disclosure include methods and test structures for an intermediate metal level of an integrated circuit (IC). A method according to the present disclosure can include: fabricating a first plurality of metal levels including an intermediate metal level of an IC structure, the intermediate metal level being one of a plurality of metal levels in the IC structure other than a capping metal level of the IC structure; performing a first functional test on a first circuit positioned within the intermediate metal level; fabricating a second plurality of metal levels after performing the first functional test, the second plurality of metal levels including the capping metal level of the IC structure; and performing a second functional test on a second circuit positioned within the plurality of metal levels, after the fabricating of the capping metal level.
Public/Granted literature
- US20170256468A1 TEST METHOD AND STRUCTURE FOR INTEGRATED CIRCUITS BEFORE COMPLETE METALIZATION Public/Granted day:2017-09-07
Information query