Invention Grant
- Patent Title: Integrated circuits having copper bonding structures with silicon carbon nitride passivation layers thereon and methods for fabricating same
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Application No.: US14816648Application Date: 2015-08-03
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Publication No.: US09859236B2Publication Date: 2018-01-02
- Inventor: Meng Meng Chong , Xuesong Rao , Chim Seng Seet , Xiaohua Zhan
- Applicant: GLOBALFOUNDRIES Singapore Pte. Ltd.
- Applicant Address: SG Singapore
- Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
- Current Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
- Current Assignee Address: SG Singapore
- Agency: Lorenz & Kopf, LLP
- Main IPC: H01L23/00
- IPC: H01L23/00 ; C22C9/01 ; C22C9/05 ; C22C9/00

Abstract:
Integrated circuits having copper bonding structures with silicon carbon nitride passivation layers and methods for making the same are provided. In an exemplary embodiment, an integrated circuit includes a substrate and a copper bonding structure having a contact surface. The copper bonding structure overlies the substrate. A passivation layer formed of silicon carbon nitride is disposed on the contact surface.
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