Invention Grant
- Patent Title: Memory device and method for fabricating the same
-
Application No.: US15342098Application Date: 2016-11-02
-
Publication No.: US09859290B1Publication Date: 2018-01-02
- Inventor: Lanxiang Wang , Hong Liao , Chao Jiang , Bo Liu , Xin Xu
- Applicant: UNITED MICROELECTRONICS CORP.
- Applicant Address: TW Hsin-Chu
- Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee Address: TW Hsin-Chu
- Agent Winston Hsu
- Main IPC: H01L21/336
- IPC: H01L21/336 ; H01L27/11521 ; H01L29/49 ; H01L29/423 ; H01L23/522 ; H01L27/08 ; H01L29/92 ; H01L27/108 ; H01L27/11502

Abstract:
A method for fabricating memory device includes the steps of: providing a substrate; forming a tunnel oxide layer on the substrate; forming a first gate layer on the tunnel oxide layer; forming a negative capacitance (NC) insulating layer on the first gate layer; and forming a second gate layer on the NC insulating layer. Preferably, the second gate layer further includes a work function metal layer on the NC insulating layer and a low resistance metal layer on the work function metal layer.
Information query
IPC分类: