Invention Grant
- Patent Title: Integrated CMOS wafers
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Application No.: US14959825Application Date: 2015-12-04
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Publication No.: US09859382B2Publication Date: 2018-01-02
- Inventor: Anthony K. Stamper , Vibhor Jain , Renata A. Camillo-Castillo
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Roberts Mlotkowski Safran Cole & Calderon, P.C.
- Agent David Cain; Andrew M. Calderon
- Main IPC: H01L29/267
- IPC: H01L29/267 ; H01L25/00 ; H01L25/065 ; H01L29/20 ; H01L29/161 ; H01L27/092 ; H01L29/737

Abstract:
The present disclosure relates to semiconductor structures and, more particularly, to integrated CMOS wafers and methods of manufacture. The structure includes: a chip of a first technology type comprising a trench structure on a front side; a chip of a second technology type positioned within the trench structure and embedded therein with an interlevel dielectric material; and a common wiring layer on the front side connecting to both the chip of the first technology type and the chip of the second technology type.
Public/Granted literature
- US20170162656A1 INTEGRATED CMOS WAFERS Public/Granted day:2017-06-08
Information query
IPC分类: