Invention Grant
- Patent Title: Vertical field effect transistor with subway etch replacement metal gate
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Application No.: US15271842Application Date: 2016-09-21
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Publication No.: US09859421B1Publication Date: 2018-01-02
- Inventor: Robert R. Robison , Reinaldo A. Vega , Rajasekhar Venigalla
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Tutunjian & Bitetto, P.C.
- Agent Louis J. Percello
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/66 ; H01L29/49

Abstract:
A method is presented for forming a vertical field effect transistor (VFET) structure. The method includes forming a plurality of vertical fins over a substrate, forming a dummy gate between the plurality of vertical fins, removing the dummy gate with a subway etch to define a gate cavity, and forming a high-k metal gate (HKMG) stack within the gate cavity. The method further includes forming the first and second source/drain regions before the HKMG stack. The method further includes defining the HKMG stack by a replacement metal gate (RMG) process, the RMG process defined in part by the subway etch. The subway etch enables removal of the dummy gate from a side portion of the VFET structure.
Information query
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