Invention Grant
- Patent Title: Bond and release layer transfer process
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Application No.: US15186184Application Date: 2016-06-17
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Publication No.: US09859458B2Publication Date: 2018-01-02
- Inventor: Francois J. Henley , Sien Kang , Mingyu Zhong , Minghang Li
- Applicant: QMAT, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: QMAT, INC.
- Current Assignee: QMAT, INC.
- Current Assignee Address: US CA Santa Clara
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L33/00 ; C30B33/04 ; H01L21/265 ; H01L21/762 ; H01L21/3105 ; C30B25/02 ; H01L21/04 ; H01L29/16 ; C30B29/40 ; C30B25/18

Abstract:
Embodiments transfer thin layers of material utilized in electronic devices (e.g., GaN for optoelectronic devices), from a donor to a handle substrate. Certain embodiments employ bond-and-release system(s) where release occurs along a cleave plane formed by implantation of particles into the donor. Some embodiments may rely upon release by converting components from solid to liquid under carefully controlled thermal conditions (e.g., solder-based materials and/or thermal decomposition of Indium-containing materials). Some embodiments utilize laser-induced film release processes using epitaxially grown or implanted regions as an optically absorptive region. A single bond-and-release sequence may involve processing an exposed N-face of GaN material. Multiple bond-and-release sequences (involving processing an exposed Ga-face of GaN material) may be employed in series, for example utilizing a temporary handle substrate as an intermediary. Particular embodiments form template blanks of high quality GaN suitable for manufacturing High Brightness-Light Emitting Diode (HB-LED) devices.
Public/Granted literature
- US20160372628A1 BOND AND RELEASE LAYER TRANSFER PROCESS Public/Granted day:2016-12-22
Information query
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