Invention Grant
- Patent Title: Method for manufacturing liquid ejection head
-
Application No.: US15137151Application Date: 2016-04-25
-
Publication No.: US09862190B2Publication Date: 2018-01-09
- Inventor: Kyosuke Nagaoka
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Fitzpatrick, Cella, Harper & Scinto
- Priority: JP2015-101851 20150519
- Main IPC: H01L21/02
- IPC: H01L21/02 ; B41J2/16 ; B08B3/08 ; C11D7/10 ; C11D7/50 ; C11D7/08

Abstract:
A method for manufacturing a liquid ejection head including a substrate having a terminal for electrical connection to an external device, an inorganic material layer on the substrate, and a flow path member disposed on the inorganic material layer and containing an organic material, and the manufacturing method includes a cleaning step of removing a silane coupling agent attached to the terminal by using a solution containing hydrogen fluoride, ammonium fluoride, and a water-soluble organic solvent.
Public/Granted literature
- US20160339704A1 METHOD FOR MANUFACTURING LIQUID EJECTION HEAD Public/Granted day:2016-11-24
Information query
IPC分类: