Invention Grant
- Patent Title: Polishing composition and method for polishing magnetic disk substrate
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Application No.: US15278351Application Date: 2016-09-28
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Publication No.: US09862863B2Publication Date: 2018-01-09
- Inventor: Toru Iwata , Akira Sugawa
- Applicant: YAMAGUCHI SEIKEN KOGYO CO., LTD.
- Applicant Address: JP
- Assignee: YAMAGUCHI SEIKEN KOGYO CO., LTD.
- Current Assignee: YAMAGUCHI SEIKEN KOGYO CO., LTD.
- Current Assignee Address: JP
- Agency: Bracewell LLP
- Agent Brad Y. Chin
- Priority: JP2014-069343 20140328
- Main IPC: C09G1/02
- IPC: C09G1/02 ; B24B37/04 ; G11B5/84 ; C09K3/14 ; C01B33/14 ; C01B33/146 ; C01B33/18

Abstract:
Embodiments of the invention provide a polishing composition including colloidal silica having an average particle size of 5 to 200 nm and pulverized wet-process silica particles having an average particle size of 0.1 to 1.0 μm, wherein a value of the ratio of the average particle size of the wet-process silica particles to that of the colloidal silica is from 2.0 to 30.0. The polishing composition, according to various embodiments, achieves a high polishing rate and has a good surface smoothness, without the use of alumina particles.
Public/Granted literature
- US20170015867A1 POLISHING COMPOSITION AND METHOD FOR POLISHING MAGNETIC DISK SUBSTRATE Public/Granted day:2017-01-19
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