Invention Grant
- Patent Title: Vacuum vapor deposition method
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Application No.: US14689389Application Date: 2015-04-17
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Publication No.: US09863034B2Publication Date: 2018-01-09
- Inventor: Yuji Yanagi
- Applicant: MITSUBISHI HEAVY INDUSTRIES, LTD.
- Applicant Address: JP Tokyo
- Assignee: MITSUBISHI HEAVY INDUSTRIES, LTD.
- Current Assignee: MITSUBISHI HEAVY INDUSTRIES, LTD.
- Current Assignee Address: JP Tokyo
- Agency: Wenderoth, Lind & Ponack, L.L.P.
- Priority: JP2009-163239 20090710
- Main IPC: C23C14/24
- IPC: C23C14/24 ; C23C14/12 ; C23C14/54

Abstract:
In a vacuum vapor deposition method which is carried out at a vacuum vapor deposition apparatus including a plurality of linear-shaped vaporization sources, an equal-thickness surface is calculated with respect to each of a polarity of release holes. The equal-thickness surface indicates a surface where a deposition amount of vapor of a vaporization material released from the corresponding release hole is the same per unit time. Then, the vaporization containers are placed in such a manner that contact points of the equal-thickness surfaces all coincide with each other on a deposition surface of a substrate, each of the contact points being where the corresponding equal-thickness surface comes in contact with the surface of the substrate.
Public/Granted literature
- US20150218691A1 VACUUM VAPOR DEPOSITION APPARATUS Public/Granted day:2015-08-06
Information query
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