Invention Grant
- Patent Title: MoS2 thin film and method for manufacturing same
-
Application No.: US14908863Application Date: 2013-08-13
-
Publication No.: US09863039B2Publication Date: 2018-01-09
- Inventor: Yo-Sep Min
- Applicant: KONKUK UNIVERSITY INDUSTRIAL COOPERATION CORP.
- Applicant Address: KR Seoul
- Assignee: KONKUK UNIVERSITY INDUSTRIAL COOPERATION CORP.
- Current Assignee: KONKUK UNIVERSITY INDUSTRIAL COOPERATION CORP.
- Current Assignee Address: KR Seoul
- Agency: Duane Morris LLP
- Agent Gregory M. Lefkowitz; Jason M. Nolan
- Priority: KR10-2013-0090880 20130731
- International Application: PCT/KR2013/007299 WO 20130813
- International Announcement: WO2015/016412 WO 20150205
- Main IPC: C23C16/30
- IPC: C23C16/30 ; C01G39/06 ; C23C16/455 ; C23C16/44

Abstract:
The present disclosure relates to a MoS2 thin film and a method for manufacturing the same. The present disclosure provides a MoS2 thin film and a method for manufacturing the same using an atomic layer deposition method. In particular, the MoS2 thin film is manufactured by an atomic layer deposition method without using a toxic gas such as H2S as a sulfur precursor. Thus, the present disclosure is eco-friendly. Furthermore, it is possible to prevent the damage and contamination of manufacturing equipment during the manufacturing process. In addition, it is possible to manufacture the MoS2 thin film by precisely controlling the thickness of the MoS2 thin film to the level of an atomic layer.
Public/Granted literature
- US20160168694A1 MOS2 THIN FILM AND METHOD FOR MANUFACTURING SAME Public/Granted day:2016-06-16
Information query
IPC分类: