Variations of the devices and methods disclosed herein pertain to an extended travel spiral flexure bearing having spiral arms, each of the spiral arms including an attachment point at the inner end thereof and at the outer end thereof. Variations of the bearing may also include a bearing clamp to be attached to the spiral flexure bearing at the attachment points, the bearing including an outer bearing portion to be disposed on the outer periphery of the flexure bearing and an inner bearing portion to be disposed at the center of the flexure bearing. Variations also pertain to a micro check valve assembly that includes a valve base, a valve cover, and a flexure that are all bonded together. The valve being closed when the valve door rests on the valve seat and open when the valve door is lifted from the valve seat.