Invention Grant
- Patent Title: Laser heterodyne interferometric straightness measurement apparatus and method with six DOFs determination
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Application No.: US15112193Application Date: 2015-02-06
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Publication No.: US09863753B2Publication Date: 2018-01-09
- Inventor: Benyong Chen , Liping Yan , Enzheng Zhang , Bin Xu
- Applicant: ZHEJIANG SCI-TECH UNIVERSITY
- Applicant Address: CN Zhejiang
- Assignee: ZHEJIANG SCI-TECH UNIVERSITY
- Current Assignee: ZHEJIANG SCI-TECH UNIVERSITY
- Current Assignee Address: CN Zhejiang
- Agency: JCIPRNET
- International Application: PCT/CN2015/072460 WO 20150206
- International Announcement: WO2016/123812 WO 20160811
- Main IPC: G01B9/02
- IPC: G01B9/02 ; G01B11/00

Abstract:
A laser heterodyne interferometric straightness measurement apparatus and method with six DOFs determination includes a part for determining the straightness and its position based on laser heterodyne interferometry and a part for error determination and compensation. The optical path for determination of four DOFs errors including three common beam-splitters, a polarizing beam-splitter, a planar mirror, a convex lens, a position-sensitive detector and two quadrant detectors is added in the optical configuration of the part for determining the straightness and its position based on laser heterodyne interferometry.
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