Invention Grant
- Patent Title: Measurement apparatus
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Application No.: US15491026Application Date: 2017-04-19
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Publication No.: US09863757B1Publication Date: 2018-01-09
- Inventor: Hiroyuki Hotta
- Applicant: FUJI XEROX CO., LTD.
- Applicant Address: JP Tokyo
- Assignee: FUJI XEROX CO., LTD.
- Current Assignee: FUJI XEROX CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: Sughrue Mion, PLLC
- Priority: JP2016-133462 20160705
- Main IPC: G01B11/06
- IPC: G01B11/06 ; G02B19/00

Abstract:
A measurement apparatus includes: a light emitting unit that projects irradiation light to an object; a first lens that changes a divergence degree of the irradiation light; an aperture stop unit that stops down the irradiation light projected from the first lens; a second lens that condenses the irradiation light passing through the aperture stop unit and projects the irradiation light to the object in a first direction; a transmission unit that is provided in a focal plane of the second lens and transmits therethrough a part of reflected light; a first light receiving unit that includes a light receiving surface that receives the part of the reflected light transmitted through the transmission unit; and a measurement unit that measures a height of a surface of the object by using a position of the part of the reflected light on the light receiving surface.
Public/Granted literature
- US20180010904A1 MEASUREMENT APPARATUS Public/Granted day:2018-01-11
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