Measurement apparatus
Abstract:
A measurement apparatus includes: a light emitting unit that projects irradiation light to an object; a first lens that changes a divergence degree of the irradiation light; an aperture stop unit that stops down the irradiation light projected from the first lens; a second lens that condenses the irradiation light passing through the aperture stop unit and projects the irradiation light to the object in a first direction; a transmission unit that is provided in a focal plane of the second lens and transmits therethrough a part of reflected light; a first light receiving unit that includes a light receiving surface that receives the part of the reflected light transmitted through the transmission unit; and a measurement unit that measures a height of a surface of the object by using a position of the part of the reflected light on the light receiving surface.
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