A method of calibrating a contact probe having a contact element includes measuring with the contact probe a first geometric property of a calibrated artifact and a second geometric property of the or a further calibrated artifact. The first and second geometric properties are such that a deviation between a measured value and the expected value, resulting from a difference between an effective diameter of the contact element and an assumed diameter used for determining the measured value, has the opposite sign for each of the first and second geometric properties. The method further includes identifying a difference in the effective diameter of the contact element from the assumed diameter including comparing deviations of the measured value to the expected value for each of the first and second geometric properties to determine whether there is a difference in the deviations.