Invention Grant
- Patent Title: Vibration-resistant rotation rate sensor
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Application No.: US14536918Application Date: 2014-11-10
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Publication No.: US09863770B2Publication Date: 2018-01-09
- Inventor: Reinhard Neul
- Applicant: Robert Bosch GmbH
- Applicant Address: DE Stuttgart
- Assignee: ROBERT BOSCH GMBH
- Current Assignee: ROBERT BOSCH GMBH
- Current Assignee Address: DE Stuttgart
- Agency: Norton Rose Fulbright US LLP
- Agent Gerard Messina
- Priority: DE102013223227 20131114
- Main IPC: G01C19/56
- IPC: G01C19/56 ; G01C19/5726 ; G01C19/574

Abstract:
A rotation rate sensor includes a substrate having a main extension plane and multiple seismic masses, in which for each seismic mass the following applies: the seismic mass is drivable at a drive oscillation, which occurs along a drive direction situated parallel to the main extension plane, the seismic mass is deflectable along two different deflection directions, each direction being perpendicular to the drive direction, the rotation rate sensor being configured to generate detection signals as a function of detected deflections of the seismic masses, one detection signal of the detection signals being associated with each deflection direction of the seismic masses, the rotation rate sensor being configured so that a linear, rotational and centrifugal acceleration of the rotation rate sensor are compensated with respect to at least one rotation axis of the rotation rate sensor through compensation in each case of two corresponding detection signals of the detection signals.
Public/Granted literature
- US20150128700A1 VIBRATION-RESISTANT ROTATION RATE SENSOR Public/Granted day:2015-05-14
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