Invention Grant
- Patent Title: Semiconductor sensor having a suspended structure and method of forming a semiconductor sensor having a suspended structure
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Application No.: US14549400Application Date: 2014-11-20
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Publication No.: US09863901B2Publication Date: 2018-01-09
- Inventor: Ando Feyh , Gary O'Brien , Ashwin K. Samarao , Fabian Purkl , Gary Yama
- Applicant: Robert Bosch GmbH
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Maginot Moore & Beck LLP
- Main IPC: G01N27/12
- IPC: G01N27/12 ; G01N27/02 ; G01N33/00

Abstract:
A semiconductor gas sensor device includes a substrate, a conductive layer supported by the substrate, a non-suitable seed layer, and a porous gas sensing layer portion. The non-suitable seed layer is formed from a first material and includes a first support portion supported by the conductive layer, a second support portion supported by the conductive layer, and a suspended seed portion extending from the first support portion to the second support portion and suspended above the conductive layer. The porous gas sensing layer portion is formed from a second material and is supported directly by the non-suitable seed layer in electrical communication with the conductive layer. The first material and the second material form a non-suitable pair of materials.
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