Invention Grant
- Patent Title: High order focus in laser radar tooling ball measurements
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Application No.: US15048963Application Date: 2016-02-19
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Publication No.: US09864204B2Publication Date: 2018-01-09
- Inventor: Daniel Gene Smith
- Applicant: Nikon Corporation
- Applicant Address: JP Tokyo
- Assignee: Nikon Corporation
- Current Assignee: Nikon Corporation
- Current Assignee Address: JP Tokyo
- Agency: Klarquist Sparkman, LLP
- Main IPC: G02B5/122
- IPC: G02B5/122 ; G02B27/09 ; G01S17/32 ; G01S7/481 ; G01S7/497

Abstract:
Interrogation optical beams are focused or otherwise shaped for delivery to a target that includes one or more tooling balls so as to have a beam radius of curvature corresponding to a tooling ball radius. Focus values can be stored in a look-up table and can include two beam focus conditions that produce a selected beam focus. The two beam focus conditions are associated with a common beam curvature. The focus conditions are associated with beam curvatures within and without a Rayleigh range from a beam waist.
Public/Granted literature
- US20160246063A1 HIGH ORDER FOCUS IN LASER RADAR TOOLING BALL MEASUREMENTS Public/Granted day:2016-08-25
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