Invention Grant
- Patent Title: Process for producing structured coatings
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Application No.: US14899435Application Date: 2014-06-06
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Publication No.: US09865461B2Publication Date: 2018-01-09
- Inventor: Christoph Mader , Paul Henrich Woebkenberg , Joachim Erz , Stephan Traut , Matthias Patz , Michael Coelle , Stephan Wieber , Patrik Stenner , Janette Klatt , Odo Wunnicke
- Applicant: Christoph Mader , Paul Henrich Woebkenberg , Joachim Erz , Stephan Traut , Matthias Patz , Michael Coelle , Stephan Wieber , Patrik Stenner , Janette Klatt , Odo Wunnicke
- Applicant Address: DE Essen
- Assignee: Evonik Degussa GmbH
- Current Assignee: Evonik Degussa GmbH
- Current Assignee Address: DE Essen
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: DE102013010099 20130618
- International Application: PCT/EP2014/061789 WO 20140606
- International Announcement: WO2014/202405 WO 20141224
- Main IPC: C23C18/00
- IPC: C23C18/00 ; H01L21/02 ; C23C18/12
Abstract:
The present invention relates to a liquid-phase process for producing structured silicon- and/or germanium-containing coatings by the application to a substrate of at least one coating composition, the partial activation of the resulting coating on the coated substrate, and oxidation of non-activated coating on the substrate, to the coats produced by the process and to their use.
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