Invention Grant
- Patent Title: Method and apparatus for pulse electrochemical polishing
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Application No.: US14402853Application Date: 2012-05-24
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Publication No.: US09865476B2Publication Date: 2018-01-09
- Inventor: Jian Wang , Yinuo Jin , Jun Wang , Hui Wang
- Applicant: Jian Wang , Yinuo Jin , Jun Wang , Hui Wang
- Applicant Address: CN Shanghai
- Assignee: ACM Research (Shanghai) Inc.
- Current Assignee: ACM Research (Shanghai) Inc.
- Current Assignee Address: CN Shanghai
- Agency: Osha Liang LLP
- International Application: PCT/CN2012/075990 WO 20120524
- International Announcement: WO2013/173998 WO 20131128
- Main IPC: H01L21/321
- IPC: H01L21/321 ; C25F3/16 ; C25F7/00 ; H01L21/66 ; C25F3/30

Abstract:
A method and apparatus for pulse electrochemical polishing a wafer are disclosed. The method comprises steps of: establishing a duty cycle table showing all points on the wafer, a removal thickness corresponding to every point and a duty cycle corresponding to the removal thickness; driving a wafer chuck holding and positioning the wafer to move at a preset speed so that a special point on the wafer is right above a nozzle ejecting charged electrolyte onto the wafer; looking up the duty cycle table and obtaining the removal thickness and the duty cycle corresponding to the special point; and applying a preset pulse power source to the wafer and the nozzle and the actual polishing power source for polishing the special point being equal to the duty cycle multiplying by the preset power source.
Public/Granted literature
- US20150155183A1 METHOD AND APPARATUS FOR PULSE ELECTROCHEMICAL POLISHING Public/Granted day:2015-06-04
Information query
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