Invention Grant
- Patent Title: Integrated circuit comprising a gas sensor
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Application No.: US15042011Application Date: 2016-02-11
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Publication No.: US09865647B2Publication Date: 2018-01-09
- Inventor: Aurelie Humbert , Roel Daamen , Viet Nguyen Hoang
- Applicant: ams International AG
- Applicant Address: CH Rapperswil-Jona
- Assignee: AMS INTERNATIONAL AG
- Current Assignee: AMS INTERNATIONAL AG
- Current Assignee Address: CH Rapperswil-Jona
- Agency: McDermott Will & Emery LLP
- Priority: EP12162383 20120330
- Main IPC: H01L27/16
- IPC: H01L27/16 ; G01N27/18 ; H01L37/00 ; G01N33/00 ; H01L37/02

Abstract:
An integrated circuit and a method of making the same. The integrated circuit includes a semiconductor substrate having a major surface. The integrated circuit also includes a thermal conductivity based gas sensor having an electrically resistive sensor element located on the major surface for exposure to a gas to be sensed. The integrated circuit further includes a barrier located on the major surface for inhibiting a flow of the gas across the sensor element.
Public/Granted literature
- US20160163766A1 INTEGRATED CIRCUIT COMPRISING A GAS SENSOR Public/Granted day:2016-06-09
Information query
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