Invention Grant
- Patent Title: High density resistive random access memory (RRAM)
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Application No.: US15293998Application Date: 2016-10-14
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Publication No.: US09865653B2Publication Date: 2018-01-09
- Inventor: Qing Liu , John Hongguang Zhang
- Applicant: STMicroelectronics, Inc.
- Applicant Address: US TX Coppell
- Assignee: STMicroelectronics, Inc.
- Current Assignee: STMicroelectronics, Inc.
- Current Assignee Address: US TX Coppell
- Agency: Gardere Wynne Sewell LLP
- Main IPC: H01L45/00
- IPC: H01L45/00 ; H01L27/24 ; H01L23/528

Abstract:
A memory cell includes a substrate layer, with a plurality of silicided semiconductor fins stacked on the substrate layer and spaced apart from one another. A first metal liner layer is stacked on the plurality of silicided semiconductor fins and on the substrate layer. A plurality of first contact pillars are stacked on the first metal liner layer adjacent a different respective one of the plurality of silicided semiconductor fins. A configurable resistance structure covers portions of the first metal liner layer that are stacked on the substrate layer and portions of the first metal liner layer that are stacked on each of the plurality of silicided semiconductor fins. A metal fill layer is stacked on the configurable resistance structure. A plurality of second contact pillars ism stacked on the metal fill layer adjacent a space between a different pair of adjacent silicided semiconductor fins of the plurality thereof.
Public/Granted literature
- US20170033284A1 HIGH DENSITY RESISTIVE RANDOM ACCESS MEMORY (RRAM) Public/Granted day:2017-02-02
Information query
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