Invention Grant
- Patent Title: Semiconductor memory device
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Application No.: US15271453Application Date: 2016-09-21
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Publication No.: US09865656B2Publication Date: 2018-01-09
- Inventor: Takahisa Kanemura , Takashi Izumida
- Applicant: Toshiba Memory Corporation
- Applicant Address: JP Minato-ku
- Assignee: TOSHIBA MEMORY CORPORATION
- Current Assignee: TOSHIBA MEMORY CORPORATION
- Current Assignee Address: JP Minato-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Main IPC: H01L45/00
- IPC: H01L45/00 ; H01L27/24 ; H01L21/28 ; G11C11/35 ; H01L23/528 ; G11C13/00

Abstract:
A semiconductor memory device according to an embodiment includes a memory cell array that includes a plurality of memory cells. The memory cell array comprises: a plurality of first conductive layers that are stacked in a first direction above a substrate and extend in a second direction intersecting the first direction; a second conductive layer extending in the first direction; a variable resistance film provided at intersections of the plurality of first conductive layers and the second conductive layer; a first select transistor disposed closer to a side of the substrate than a lowermost layer of the plurality of first conductive layers, the first select transistor including a first select gate line intersecting the second conductive layer; a third conductive layer that extends in a third direction intersecting the second direction and is connected to a lower end of the second conductive layer via the first select transistor; and a second select transistor disposed between at least one pair of the plurality of first conductive layers adjacent in the first direction, the second select transistor including a second select gate line intersecting the second conductive layer.
Public/Granted literature
- US20170236872A1 SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2017-08-17
Information query
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