Invention Grant
- Patent Title: Single and double diffusion breaks on integrated circuit products comprised of FinFET devices
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Application No.: US15168690Application Date: 2016-05-31
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Publication No.: US09865704B2Publication Date: 2018-01-09
- Inventor: Ruilong Xie , Kwan-Yong Lim , Min Gyu Sung , Ryan Ryoung-Han Kim
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Amerson Law Firm, PLLC
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L29/66 ; H01L29/06 ; H01L27/088

Abstract:
One illustrative integrated circuit product disclosed herein includes, among other things, a plurality of FinFET devices, each of which comprises a gate structure comprising a high-k gate insulation material and at least one layer of metal, a single diffusion break (SDB) isolation structure positioned in a first trench defined in a semiconductor substrate between first and second active regions, the SDB isolation structure comprising the high-k insulating material and the at least one layer of metal, and a double diffusion break (DDB) isolation structure positioned in a second trench defined in a semiconductor substrate between third and fourth active regions, the DDB isolation structure comprising a first insulating material that substantially fills the second trench.
Public/Granted literature
- US20170141211A1 SINGLE AND DOUBLE DIFFUSION BREAKS ON INTEGRATED CIRCUIT PRODUCTS COMPRISED OF FINFET DEVICES Public/Granted day:2017-05-18
Information query
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