Invention Grant
- Patent Title: Switching device
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Application No.: US15425286Application Date: 2017-02-06
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Publication No.: US09865728B2Publication Date: 2018-01-09
- Inventor: Akitaka Soeno , Masaru Senoo , Takashi Kuno , Satoshi Kuwano , Noriyuki Kakimoto , Toshitaka Kanemaru , Kenta Hashimoto , Yuma Kagata
- Applicant: TOYOTA JIDOSHA KABUSHIKI KAISHA
- Applicant Address: JP Toyota
- Assignee: TOYOTA JIDOSHA KABUSHIKI KAISHA
- Current Assignee: TOYOTA JIDOSHA KABUSHIKI KAISHA
- Current Assignee Address: JP Toyota
- Agency: Oliff PLC
- Priority: JP2016-046094 20160309
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L29/778 ; H01L29/78 ; H01L29/423 ; H01L29/10 ; H01L29/08 ; H01L29/739

Abstract:
A switching device including a semiconductor substrate including a trench (gate electrode) extending in a mesh shape is provided, and the upper surface of the semiconductor substrate is covered by the interlayer insulating film. Within an element range a contact hole is provided in an interlayer insulating film above each cell region while within a surrounding range an entire upper surface of each cell region is covered by the interlayer insulating film. The first metal layer covers the interlayer insulating film, and has recesses above the contact holes. The insulating protective film covers an outer peripheral side portion of the first metal layer within the surrounding range. The second metal layer covers the first metal layer within an opening of the insulating protective film. Within the surrounding range, a second conductivity-type region extending to below lower ends of the trench and is electrically connected to the body region, is provided.
Public/Granted literature
- US20170263754A1 SWITCHING DEVICE Public/Granted day:2017-09-14
Information query
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