- Patent Title: Method for producing semiconductor device and semiconductor device
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Application No.: US15191711Application Date: 2016-06-24
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Publication No.: US09865741B2Publication Date: 2018-01-09
- Inventor: Fujio Masuoka , Hiroki Nakamura
- Applicant: UNISANTIS ELECTRONICS SINGAPORE PTE. LTD.
- Applicant Address: SG Singapore
- Assignee: UNISANTIS ELECTRONICS SINGAPORE PTE. LTD.
- Current Assignee: UNISANTIS ELECTRONICS SINGAPORE PTE. LTD.
- Current Assignee Address: SG Singapore
- Agency: Brinks Gilson & Lione
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L29/786 ; H01L21/8234 ; H01L29/423 ; H01L29/66

Abstract:
A method for producing a semiconductor device includes a first step of forming a first insulating film around a fin-shaped semiconductor layer on a semiconductor substrate; a second step of forming a second insulating film, depositing a first polysilicon, planarizing the first polysilicon, forming a third insulating film, forming a second resist, and forming a pillar-shaped semiconductor layer, a first dummy gate, and a first hard mask; and a third step of forming a fourth insulating film, depositing a second polysilicon, planarizing the second polysilicon, etching back the second polysilicon, depositing a sixth insulating film, forming a fourth resist, forming a second hard mask, forming a third hard mask, forming a second dummy gate, and forming a first dummy contact on the fin-shaped semiconductor layer.
Public/Granted literature
- US20160308065A1 METHOD FOR PRODUCING SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE Public/Granted day:2016-10-20
Information query
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