Method for driving piezoelectric element, piezoelectric element, and piezoelectric element applied device
Abstract:
A method for driving a piezoelectric element including a first electrode, a piezoelectric layer formed on the first electrode and containing a composite oxide of an ABO3 type perovskite structure, and a second electrode formed on the piezoelectric layer, and the method includes driving the piezoelectric element by applying a signal having a predetermined driving waveform by a predetermined number of times, and driving the piezoelectric element by applying a signal having the predetermined driving waveform in reverse polarity.
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