Invention Grant
- Patent Title: Method for synthesizing a halogen-functionalized carbon material and method for fabricating an electronic device employing the same
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Application No.: US14683050Application Date: 2015-04-09
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Publication No.: US09865818B2Publication Date: 2018-01-09
- Inventor: Hyungjun Kim , Tae Jin Choi
- Applicant: Industry-Academic Cooperation Foundation, Yonsei University
- Applicant Address: KR Seoul
- Assignee: INDUSTRY-ACADEMIC COOPERATION FOUNDATION, YONSEI UNIVERSITY
- Current Assignee: INDUSTRY-ACADEMIC COOPERATION FOUNDATION, YONSEI UNIVERSITY
- Current Assignee Address: KR Seoul
- Agency: Procopio, Cory, Hargreaves & Savitch LLP
- Priority: KR10-2014-0042427 20140409
- Main IPC: H01L51/00
- IPC: H01L51/00 ; H01L21/768 ; G01N33/00 ; H01L29/41 ; C01B32/186 ; H01L51/05

Abstract:
Provided are methods for synthesizing a halogen-functionalized carbon material and for fabricating an electronic device employing the same. The synthesizing method of the halogen-functionalized carbon material may include thermally treating a transition metal material at a first temperature in a hydrogen atmosphere and thermally treating the transition metal material at a second temperature, which is lower than or equal to the first temperature, while further supplying halocarbon on the transition metal material.
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