Invention Grant
- Patent Title: Vertical cavity surface emitting laser array and method for manufacturing the same
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Application No.: US15002607Application Date: 2016-01-21
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Publication No.: US09865994B2Publication Date: 2018-01-09
- Inventor: Ippei Matsubara , Takayuki Kona , Keiji Iwata
- Applicant: MURATA MANUFACTURING CO., LTD.
- Applicant Address: JP Kyoto-fu
- Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee Address: JP Kyoto-fu
- Agency: Studebaker & Brackett PC
- Priority: JP2013-151606 20130722
- Main IPC: H01S5/00
- IPC: H01S5/00 ; H01S3/13 ; H01S5/42 ; H01S5/022 ; H01S5/40 ; H01S5/02 ; H01S5/187 ; H01S5/042 ; H01S5/183
Abstract:
A VCSEL array includes a base substrate, a plurality of VCSEL devices and an inter-device line. Each of the plurality of VCSEL devices is disposed on a front side of the base substrate. The inter-device line connects two of the plurality of VCSEL devices that are adjacent to each other, the two VCSEL devices being connected in series such that forward directions of the two VCSEL devices are the same. An insulating groove that electrically insulates the two VCSEL devices is formed on the base substrate.
Public/Granted literature
- US20160156157A1 VERTICAL CAVITY SURFACE EMITTING LASER ARRAY AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2016-06-02
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