Invention Grant
- Patent Title: Vibrating device
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Application No.: US14937026Application Date: 2015-11-10
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Publication No.: US09866199B2Publication Date: 2018-01-09
- Inventor: Toshio Nishimura , Takashi Hase , Keisuke Takeyama , Hiroaki Kaida , Keiichi Umeda , Takehiko Kishi , Hiroshi Yamada
- Applicant: Murata Manufacturing Co., Ltd.
- Applicant Address: JP Nagaokakyo-Shi, Kyoto-Fu
- Assignee: MURATA MANUFACTURING CO., LTD.
- Current Assignee: MURATA MANUFACTURING CO., LTD.
- Current Assignee Address: JP Nagaokakyo-Shi, Kyoto-Fu
- Agency: Arent Fox LLP
- Priority: JP2013-101300 20130513
- Main IPC: H03H9/21
- IPC: H03H9/21 ; H01L41/047

Abstract:
A vibrating device having tuning fork arms extending in a first direction that are joined to a base portion and are arranged side by side in an second direction. Each of the tuning fork arms has a structure that a silicon oxide layer is laminated on a Si layer made of a degenerate semiconductor, and that an excitation portion is provided on the silicon oxide layer. When a total thickness of the Si layer is denoted by T1, a total thickness of the silicon oxide layer is denoted by T2, and the temperature coefficient of resonant frequency (TCF) when the silicon oxide layer is not provided on the Si layer is denoted by x, a thickness ratio T2/(T1+T2) is within a range of (−0.0002x2−0.0136x+0.0014)±0.05.
Public/Granted literature
- US20160065173A1 VIBRATING DEVICE Public/Granted day:2016-03-03
Information query
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