Invention Grant
- Patent Title: Electronic device and method for fabricating the same
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Application No.: US15207235Application Date: 2016-07-11
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Publication No.: US09881935B2Publication Date: 2018-01-30
- Inventor: Kwang-Seok Oh
- Applicant: SK hynix Inc.
- Applicant Address: KR Gyeonggi-do
- Assignee: SK Hynix Inc.
- Current Assignee: SK Hynix Inc.
- Current Assignee Address: KR Gyeonggi-do
- Agency: IP & T Group LLP
- Priority: KR10-2015-0189738 20151230
- Main IPC: H01L23/522
- IPC: H01L23/522 ; H01L23/528 ; H01L27/115 ; H01L27/11582 ; H01L21/768 ; H01L27/11556

Abstract:
Provided is an electronic device including a semiconductor memory. The semiconductor memory may include: a substrate; and a stepped structure including first interlayer dielectric layers and conductive layers which are alternately stacked over the substrate, wherein ends of the conductive layers are exposed along the profile of the stepped structure, and the stepped structure further includes a barrier layer formed on a sidewall of the conductive layer.
Public/Granted literature
- US20170194255A1 ELECTRONIC DEVICE AND METHOD FOR FABRICATING THE SAME Public/Granted day:2017-07-06
Information query
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