Invention Grant
- Patent Title: Molded dielectric fin-based nanostructure
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Application No.: US14138254Application Date: 2013-12-23
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Publication No.: US09882053B2Publication Date: 2018-01-30
- Inventor: Seiyon Kim , Kelin J. Kuhn
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Trop, Pruner & Hu, P.C.
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/66 ; H01L21/56

Abstract:
An embodiment concerns selective etching of a structure (e.g., a fin) to form a void with the shape of the original structure. This void then functions as a mold. Flowable dielectric material fills the void to form the same shape as the original structure/mold. Post-processing then occurs (e.g., oxidation build up and annealing) to harden the dielectric in the void. The resulting product is a molded dielectric nanostructure that has the same shape as the original structure but consists of a different material (e.g., dielectric instead of silicon). Other embodiments are described herein.
Public/Granted literature
- US20150179786A1 MOLDED DIELECTRIC NANOSTRUCTURE Public/Granted day:2015-06-25
Information query
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