Invention Grant
- Patent Title: Thermoelement including a three-dimensional microstructure, and method for producing a thermoelement
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Application No.: US13499083Application Date: 2010-09-20
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Publication No.: US09884759B2Publication Date: 2018-02-06
- Inventor: Harry Hedler , Jörg Zapf
- Applicant: Harry Hedler , Jörg Zapf
- Applicant Address: DE Munich
- Assignee: SIEMENS AKTIENGESELLSCHAFT
- Current Assignee: SIEMENS AKTIENGESELLSCHAFT
- Current Assignee Address: DE Munich
- Agency: Slayden Grubert Beard PLLC
- Priority: DE102009043414 20090929
- International Application: PCT/EP2010/063811 WO 20100920
- International Announcement: WO2011/039070 WO 20110407
- Main IPC: B32B3/00
- IPC: B32B3/00 ; G01K7/02 ; G01K7/08 ; B81B1/00 ; B81B7/00 ; B81B7/02 ; B81B7/04 ; H01L35/32 ; B29C39/00 ; B29C39/02 ; B81C99/00

Abstract:
A three-dimensional micro-structure has a plurality of adjacent micro-columns which are arranged at a distance from each other and essentially parallel in relation to the respective longitudinal extension. The micro-columns are made of at least one micro-column material having respectively an aspect ratio in the region of 20-1000 and respectively a micro-column diameter in the region of 0.1 μm-200 μm. A micro-column intermediate chamber is arranged between adjacent micro-columns having a micro-column distance selected from between the adjacent micro-columns in the region of 1 μm-100 μm. According to a method for producing the three-dimensional micro-structures: a) a template is provided with template material, b) the micro-column material is arranged in the column-like cavities, and c) the template is at least partially removed.
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