Invention Grant
- Patent Title: Silicon nitride substrate and silicon nitride circuit board using the same
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Application No.: US15430920Application Date: 2017-02-13
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Publication No.: US09884762B2Publication Date: 2018-02-06
- Inventor: Noritaka Nakayama , Katsuyuki Aoki , Takashi Sano
- Applicant: KABUSHIKI KAISHA TOSHIBA , TOSHIBA MATERIALS CO., LTD.
- Applicant Address: JP Minato-Ku JP Yokohama-Shi
- Assignee: Kabushiki Kaisha Toshiba,Toshiba Materials Co., Ltd.
- Current Assignee: Kabushiki Kaisha Toshiba,Toshiba Materials Co., Ltd.
- Current Assignee Address: JP Minato-Ku JP Yokohama-Shi
- Agency: Burr & Brown, PLLC
- Priority: JP2013-220459 20131023
- Main IPC: C04B35/584
- IPC: C04B35/584 ; C01B21/068 ; C04B35/587 ; C04B35/626 ; C04B35/63 ; C04B35/632 ; C04B35/64 ; H01L23/498 ; H01L23/373

Abstract:
A silicon nitride substrate including silicon nitride crystal grains and a grain boundary phase and having a thermal conductivity of 50 W/m·K or more, wherein, in a sectional structure of the silicon nitride substrate, a ratio (T2/T1) of a total length T2 of the grain boundary phase in a thickness direction with respect to a thickness T1 of the silicon nitride substrate is 0.01 to 0.30, and a variation from a dielectric strength mean value when measured by a four-terminal method in which electrodes are brought into contact with a front and a rear surfaces of the substrate is 20% or less. The dielectric strength mean value of the silicon nitride substrate can be 15 kV/rum or more. According to above structure, there can be obtained a silicon nitride substrate and a silicon nitride circuit board using the substrate in which variation in the dielectric strength is decreased.
Public/Granted literature
- US20170152143A1 SILICON NITRIDE SUBSTRATE AND SILICON NITRIDE CIRCUIT BOARD USING THE SAME Public/Granted day:2017-06-01
Information query
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