Invention Grant
- Patent Title: Coating composition for preventing collapse of capacitor
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Application No.: US14440414Application Date: 2013-12-10
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Publication No.: US09884970B2Publication Date: 2018-02-06
- Inventor: Su Jin Lee , Gi Hong Kim , Seung Hun Lee
- Applicant: YOUNG CHANG CHEMICAL CO., LTD.
- Applicant Address: KR Seongju-gun
- Assignee: YOUNG CHANG CHEMICAL CO., LTD
- Current Assignee: YOUNG CHANG CHEMICAL CO., LTD
- Current Assignee Address: KR Seongju-gun
- Agency: Sughrue Mion, PLLC
- Priority: KR10-2012-0144338 20121212
- International Application: PCT/KR2013/011389 WO 20131210
- International Announcement: WO2014/092424 WO 20140619
- Main IPC: H01L49/02
- IPC: H01L49/02 ; C09D7/00 ; C09D7/12 ; C09D183/04 ; H01L27/108 ; C08K5/521
Abstract:
Disclosed herein is a coating composition for preventing the collapse of a capacitor, comprising a silane compound or a phosphorus compound. The coating composition can adjust a contact angle with regard to water on a substrate, thereby preventing the collapse of capacitor patterns on the substrate.
Public/Granted literature
- US20150274991A1 COATING COMPOSITION FOR PREVENTING COLLAPSE OF CAPACITOR Public/Granted day:2015-10-01
Information query
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