Invention Grant
- Patent Title: Mask stack and method of controlling the same
-
Application No.: US14815809Application Date: 2015-07-31
-
Publication No.: US09885105B2Publication Date: 2018-02-06
- Inventor: Yongsuk Lee , Jongpyo Shin , Sunglae Cho , Jinok Choi
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Gyeonggi-do
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Gyeonggi-do
- Agency: Knobbe Martens Olson & Bear LLP
- Priority: KR10-2015-0029855 20150303
- Main IPC: C23C14/04
- IPC: C23C14/04 ; C23C14/56

Abstract:
A mask stack and a method of controlling the mask stack are disclosed. In one aspect, the method includes installing, in the mask stack, a first cassette comprising masks that have not been used in a deposition process and a second cassette comprising an accommodation space which is empty. The method also includes using, in the deposition process, at least one mask from the masks included in the first cassette. The method further includes inserting, into the accommodation space of the second cassette, the at least one mask used in the deposition process.
Public/Granted literature
- US20160258050A1 MASK STACK AND METHOD OF CONTROLLING THE SAME Public/Granted day:2016-09-08
Information query
IPC分类: