Invention Grant
- Patent Title: Vaporizer, center rod used therein, and method for vaporizing material carried by carrier gas
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Application No.: US14001910Application Date: 2012-02-27
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Publication No.: US09885113B2Publication Date: 2018-02-06
- Inventor: Masaru Umeda , Masayuki Toda
- Applicant: Masaru Umeda , Masayuki Toda
- Applicant Address: JP Tokyo JP Fukushima
- Assignee: KABUSHIKI KAISHA WATANABE SHOKO,Masayuki Toda
- Current Assignee: KABUSHIKI KAISHA WATANABE SHOKO,Masayuki Toda
- Current Assignee Address: JP Tokyo JP Fukushima
- Agency: Young & Thompson
- Priority: JP2011-041962 20110228
- International Application: PCT/JP2012/054803 WO 20120227
- International Announcement: WO2012/118019 WO 20120907
- Main IPC: C23C16/448
- IPC: C23C16/448

Abstract:
To obtain a vaporizer in which thin film-forming raw material solutions are stably and reliably carried by a carrier gas while being reliably separated within the dispersion unit body and the plurality of thin film-forming raw material solutions are stably vaporized in the subsequent vaporization unit, a center rod used in the vaporizer, and a method for vaporizing raw materials entrained by a carrier gas. A carrier gas introduction bore is formed in the center axis direction of the dispersion unit body. A center rod is inserted in the carrier gas introduction bore. The interspace between the inner wall of the bore and the outer wall of the rod forms a gas passage. Multiple thin film-forming material supply units are situated midway of the gas passage of the dispersion unit body, supplying thin film-forming materials. The center rod has sealing members in the longitudinal direction of the center rod.
Public/Granted literature
- US20140050852A1 VAPORIZER, CENTER ROD USED THEREIN, AND METHOD FOR VAPORIZING MATERIAL CARRIED BY CARRIER GAS Public/Granted day:2014-02-20
Information query
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